9/25/2011	12:00:10 AM	Helium valve closed
9/25/2011	12:00:10 AM	H2 valve closed
9/25/2011	12:00:10 AM	BCl3 valve closed
9/25/2011	12:00:10 AM	PH3 valve closed
9/25/2011	12:00:10 AM	SiCl4 pre valve closed
9/25/2011	12:00:10 AM	SiCl4 post valve closed
9/25/2011	12:00:10 AM	Bypass valve closed
9/25/2011	12:00:10 AM	Bubbler valve closed
9/25/2011	12:00:10 AM	Main Vac valve opened
9/25/2011	12:00:10 AM	Helium MFC set to  0.000000
9/25/2011	12:00:10 AM	H2 MFC set to  0.000000
9/25/2011	12:00:10 AM	BCl3 MFC set to  0.000000
9/25/2011	12:00:10 AM	PHl3 MFC set to  0.000000
9/25/2011	12:00:10 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:00:10 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:00:10 AM	Tube furnace set to 150
9/25/2011	12:00:40 AM	H2 valve closed
9/25/2011	12:00:40 AM	BCl3 valve closed
9/25/2011	12:00:40 AM	PH3 valve closed
9/25/2011	12:00:40 AM	SiCl4 pre valve closed
9/25/2011	12:00:40 AM	SiCl4 post valve closed
9/25/2011	12:00:40 AM	Bypass valve closed
9/25/2011	12:00:40 AM	Bubbler valve closed
9/25/2011	12:00:40 AM	Helium valve opened
9/25/2011	12:00:40 AM	Main Vac valve opened
9/25/2011	12:00:40 AM	Helium MFC set to  20.000000
9/25/2011	12:00:40 AM	H2 MFC set to  0.000000
9/25/2011	12:00:40 AM	BCl3 MFC set to  0.000000
9/25/2011	12:00:40 AM	PHl3 MFC set to  0.000000
9/25/2011	12:00:40 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:00:40 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:00:40 AM	Tube furnace set to 150
9/25/2011	12:01:10 AM	Helium valve closed
9/25/2011	12:01:10 AM	H2 valve closed
9/25/2011	12:01:10 AM	BCl3 valve closed
9/25/2011	12:01:10 AM	PH3 valve closed
9/25/2011	12:01:10 AM	SiCl4 pre valve closed
9/25/2011	12:01:10 AM	SiCl4 post valve closed
9/25/2011	12:01:10 AM	Bypass valve closed
9/25/2011	12:01:10 AM	Bubbler valve closed
9/25/2011	12:01:10 AM	Main Vac valve opened
9/25/2011	12:01:10 AM	Helium MFC set to  0.000000
9/25/2011	12:01:10 AM	H2 MFC set to  0.000000
9/25/2011	12:01:10 AM	BCl3 MFC set to  0.000000
9/25/2011	12:01:10 AM	PHl3 MFC set to  0.000000
9/25/2011	12:01:10 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:01:10 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:01:10 AM	Tube furnace set to 150
9/25/2011	12:01:40 AM	H2 valve closed
9/25/2011	12:01:40 AM	BCl3 valve closed
9/25/2011	12:01:40 AM	PH3 valve closed
9/25/2011	12:01:40 AM	SiCl4 pre valve closed
9/25/2011	12:01:40 AM	SiCl4 post valve closed
9/25/2011	12:01:40 AM	Bypass valve closed
9/25/2011	12:01:40 AM	Bubbler valve closed
9/25/2011	12:01:40 AM	Helium valve opened
9/25/2011	12:01:40 AM	Main Vac valve opened
9/25/2011	12:01:40 AM	Helium MFC set to  20.000000
9/25/2011	12:01:40 AM	H2 MFC set to  0.000000
9/25/2011	12:01:40 AM	BCl3 MFC set to  0.000000
9/25/2011	12:01:40 AM	PHl3 MFC set to  0.000000
9/25/2011	12:01:40 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:01:40 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:01:41 AM	Tube furnace set to 150
9/25/2011	12:02:11 AM	Helium valve closed
9/25/2011	12:02:11 AM	H2 valve closed
9/25/2011	12:02:11 AM	BCl3 valve closed
9/25/2011	12:02:11 AM	PH3 valve closed
9/25/2011	12:02:11 AM	SiCl4 pre valve closed
9/25/2011	12:02:11 AM	SiCl4 post valve closed
9/25/2011	12:02:11 AM	Bypass valve closed
9/25/2011	12:02:11 AM	Bubbler valve closed
9/25/2011	12:02:11 AM	Main Vac valve opened
9/25/2011	12:02:11 AM	Helium MFC set to  0.000000
9/25/2011	12:02:11 AM	H2 MFC set to  0.000000
9/25/2011	12:02:11 AM	BCl3 MFC set to  0.000000
9/25/2011	12:02:11 AM	PHl3 MFC set to  0.000000
9/25/2011	12:02:11 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:02:11 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:02:11 AM	Tube furnace set to 150
9/25/2011	12:02:41 AM	H2 valve closed
9/25/2011	12:02:41 AM	BCl3 valve closed
9/25/2011	12:02:41 AM	PH3 valve closed
9/25/2011	12:02:41 AM	SiCl4 pre valve closed
9/25/2011	12:02:41 AM	SiCl4 post valve closed
9/25/2011	12:02:41 AM	Bypass valve closed
9/25/2011	12:02:41 AM	Bubbler valve closed
9/25/2011	12:02:41 AM	Helium valve opened
9/25/2011	12:02:41 AM	Main Vac valve opened
9/25/2011	12:02:41 AM	Helium MFC set to  20.000000
9/25/2011	12:02:41 AM	H2 MFC set to  0.000000
9/25/2011	12:02:41 AM	BCl3 MFC set to  0.000000
9/25/2011	12:02:41 AM	PHl3 MFC set to  0.000000
9/25/2011	12:02:41 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:02:41 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:02:41 AM	Tube furnace set to 150
9/25/2011	12:03:11 AM	Helium valve closed
9/25/2011	12:03:11 AM	H2 valve closed
9/25/2011	12:03:11 AM	BCl3 valve closed
9/25/2011	12:03:11 AM	PH3 valve closed
9/25/2011	12:03:11 AM	SiCl4 pre valve closed
9/25/2011	12:03:11 AM	SiCl4 post valve closed
9/25/2011	12:03:11 AM	Bypass valve closed
9/25/2011	12:03:11 AM	Bubbler valve closed
9/25/2011	12:03:11 AM	Main Vac valve opened
9/25/2011	12:03:11 AM	Helium MFC set to  0.000000
9/25/2011	12:03:11 AM	H2 MFC set to  0.000000
9/25/2011	12:03:11 AM	BCl3 MFC set to  0.000000
9/25/2011	12:03:11 AM	PHl3 MFC set to  0.000000
9/25/2011	12:03:11 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:03:11 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:03:11 AM	Tube furnace set to 150
9/25/2011	12:03:41 AM	H2 valve closed
9/25/2011	12:03:41 AM	BCl3 valve closed
9/25/2011	12:03:41 AM	PH3 valve closed
9/25/2011	12:03:41 AM	SiCl4 pre valve closed
9/25/2011	12:03:41 AM	SiCl4 post valve closed
9/25/2011	12:03:41 AM	Bypass valve closed
9/25/2011	12:03:41 AM	Bubbler valve closed
9/25/2011	12:03:41 AM	Helium valve opened
9/25/2011	12:03:41 AM	Main Vac valve opened
9/25/2011	12:03:41 AM	Helium MFC set to  20.000000
9/25/2011	12:03:41 AM	H2 MFC set to  0.000000
9/25/2011	12:03:41 AM	BCl3 MFC set to  0.000000
9/25/2011	12:03:41 AM	PHl3 MFC set to  0.000000
9/25/2011	12:03:41 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:03:41 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:03:41 AM	Tube furnace set to 150
9/25/2011	12:04:12 AM	Helium valve closed
9/25/2011	12:04:12 AM	H2 valve closed
9/25/2011	12:04:12 AM	BCl3 valve closed
9/25/2011	12:04:12 AM	PH3 valve closed
9/25/2011	12:04:12 AM	SiCl4 pre valve closed
9/25/2011	12:04:12 AM	SiCl4 post valve closed
9/25/2011	12:04:12 AM	Bypass valve closed
9/25/2011	12:04:12 AM	Bubbler valve closed
9/25/2011	12:04:12 AM	Main Vac valve opened
9/25/2011	12:04:12 AM	Helium MFC set to  0.000000
9/25/2011	12:04:12 AM	H2 MFC set to  0.000000
9/25/2011	12:04:12 AM	BCl3 MFC set to  0.000000
9/25/2011	12:04:12 AM	PHl3 MFC set to  0.000000
9/25/2011	12:04:12 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:04:12 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:04:12 AM	Tube furnace set to 150
9/25/2011	12:04:42 AM	H2 valve closed
9/25/2011	12:04:42 AM	BCl3 valve closed
9/25/2011	12:04:42 AM	PH3 valve closed
9/25/2011	12:04:42 AM	SiCl4 pre valve closed
9/25/2011	12:04:42 AM	SiCl4 post valve closed
9/25/2011	12:04:42 AM	Bypass valve closed
9/25/2011	12:04:42 AM	Bubbler valve closed
9/25/2011	12:04:42 AM	Helium valve opened
9/25/2011	12:04:42 AM	Main Vac valve opened
9/25/2011	12:04:42 AM	Helium MFC set to  20.000000
9/25/2011	12:04:42 AM	H2 MFC set to  0.000000
9/25/2011	12:04:42 AM	BCl3 MFC set to  0.000000
9/25/2011	12:04:42 AM	PHl3 MFC set to  0.000000
9/25/2011	12:04:42 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:04:42 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:04:42 AM	Tube furnace set to 150
9/25/2011	12:05:12 AM	Helium valve closed
9/25/2011	12:05:12 AM	H2 valve closed
9/25/2011	12:05:12 AM	BCl3 valve closed
9/25/2011	12:05:12 AM	PH3 valve closed
9/25/2011	12:05:12 AM	SiCl4 pre valve closed
9/25/2011	12:05:12 AM	SiCl4 post valve closed
9/25/2011	12:05:12 AM	Bypass valve closed
9/25/2011	12:05:12 AM	Bubbler valve closed
9/25/2011	12:05:12 AM	Main Vac valve opened
9/25/2011	12:05:12 AM	Helium MFC set to  0.000000
9/25/2011	12:05:12 AM	H2 MFC set to  0.000000
9/25/2011	12:05:12 AM	BCl3 MFC set to  0.000000
9/25/2011	12:05:12 AM	PHl3 MFC set to  0.000000
9/25/2011	12:05:12 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:05:12 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:05:12 AM	Tube furnace set to 150
9/25/2011	12:05:42 AM	H2 valve closed
9/25/2011	12:05:42 AM	BCl3 valve closed
9/25/2011	12:05:42 AM	PH3 valve closed
9/25/2011	12:05:42 AM	SiCl4 pre valve closed
9/25/2011	12:05:42 AM	SiCl4 post valve closed
9/25/2011	12:05:42 AM	Bypass valve closed
9/25/2011	12:05:42 AM	Bubbler valve closed
9/25/2011	12:05:42 AM	Helium valve opened
9/25/2011	12:05:42 AM	Main Vac valve opened
9/25/2011	12:05:42 AM	Helium MFC set to  20.000000
9/25/2011	12:05:42 AM	H2 MFC set to  0.000000
9/25/2011	12:05:42 AM	BCl3 MFC set to  0.000000
9/25/2011	12:05:42 AM	PHl3 MFC set to  0.000000
9/25/2011	12:05:42 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:05:42 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:05:42 AM	Tube furnace set to 150
9/25/2011	12:06:12 AM	Helium valve closed
9/25/2011	12:06:12 AM	H2 valve closed
9/25/2011	12:06:12 AM	BCl3 valve closed
9/25/2011	12:06:12 AM	PH3 valve closed
9/25/2011	12:06:12 AM	SiCl4 pre valve closed
9/25/2011	12:06:12 AM	SiCl4 post valve closed
9/25/2011	12:06:12 AM	Bypass valve closed
9/25/2011	12:06:12 AM	Bubbler valve closed
9/25/2011	12:06:12 AM	Main Vac valve opened
9/25/2011	12:06:12 AM	Helium MFC set to  0.000000
9/25/2011	12:06:12 AM	H2 MFC set to  0.000000
9/25/2011	12:06:12 AM	BCl3 MFC set to  0.000000
9/25/2011	12:06:12 AM	PHl3 MFC set to  0.000000
9/25/2011	12:06:12 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:06:12 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:06:13 AM	Tube furnace set to 150
9/25/2011	12:06:43 AM	H2 valve closed
9/25/2011	12:06:43 AM	BCl3 valve closed
9/25/2011	12:06:43 AM	PH3 valve closed
9/25/2011	12:06:43 AM	SiCl4 pre valve closed
9/25/2011	12:06:43 AM	SiCl4 post valve closed
9/25/2011	12:06:43 AM	Bypass valve closed
9/25/2011	12:06:43 AM	Bubbler valve closed
9/25/2011	12:06:43 AM	Helium valve opened
9/25/2011	12:06:43 AM	Main Vac valve opened
9/25/2011	12:06:43 AM	Helium MFC set to  20.000000
9/25/2011	12:06:43 AM	H2 MFC set to  0.000000
9/25/2011	12:06:43 AM	BCl3 MFC set to  0.000000
9/25/2011	12:06:43 AM	PHl3 MFC set to  0.000000
9/25/2011	12:06:43 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:06:43 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:06:43 AM	Tube furnace set to 150
9/25/2011	12:07:13 AM	Helium valve closed
9/25/2011	12:07:13 AM	H2 valve closed
9/25/2011	12:07:13 AM	BCl3 valve closed
9/25/2011	12:07:13 AM	PH3 valve closed
9/25/2011	12:07:13 AM	SiCl4 pre valve closed
9/25/2011	12:07:13 AM	SiCl4 post valve closed
9/25/2011	12:07:13 AM	Bypass valve closed
9/25/2011	12:07:13 AM	Bubbler valve closed
9/25/2011	12:07:13 AM	Main Vac valve opened
9/25/2011	12:07:13 AM	Helium MFC set to  0.000000
9/25/2011	12:07:13 AM	H2 MFC set to  0.000000
9/25/2011	12:07:13 AM	BCl3 MFC set to  0.000000
9/25/2011	12:07:13 AM	PHl3 MFC set to  0.000000
9/25/2011	12:07:13 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:07:13 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:07:13 AM	Tube furnace set to 150
9/25/2011	12:07:43 AM	H2 valve closed
9/25/2011	12:07:43 AM	BCl3 valve closed
9/25/2011	12:07:43 AM	PH3 valve closed
9/25/2011	12:07:43 AM	SiCl4 pre valve closed
9/25/2011	12:07:43 AM	SiCl4 post valve closed
9/25/2011	12:07:43 AM	Bypass valve closed
9/25/2011	12:07:43 AM	Bubbler valve closed
9/25/2011	12:07:43 AM	Helium valve opened
9/25/2011	12:07:43 AM	Main Vac valve opened
9/25/2011	12:07:43 AM	Helium MFC set to  20.000000
9/25/2011	12:07:43 AM	H2 MFC set to  0.000000
9/25/2011	12:07:43 AM	BCl3 MFC set to  0.000000
9/25/2011	12:07:43 AM	PHl3 MFC set to  0.000000
9/25/2011	12:07:43 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:07:43 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:07:43 AM	Tube furnace set to 150
9/25/2011	12:08:13 AM	Helium valve closed
9/25/2011	12:08:13 AM	H2 valve closed
9/25/2011	12:08:13 AM	BCl3 valve closed
9/25/2011	12:08:13 AM	PH3 valve closed
9/25/2011	12:08:13 AM	SiCl4 pre valve closed
9/25/2011	12:08:13 AM	SiCl4 post valve closed
9/25/2011	12:08:13 AM	Bypass valve closed
9/25/2011	12:08:13 AM	Bubbler valve closed
9/25/2011	12:08:13 AM	Main Vac valve opened
9/25/2011	12:08:13 AM	Helium MFC set to  0.000000
9/25/2011	12:08:13 AM	H2 MFC set to  0.000000
9/25/2011	12:08:13 AM	BCl3 MFC set to  0.000000
9/25/2011	12:08:13 AM	PHl3 MFC set to  0.000000
9/25/2011	12:08:13 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:08:13 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:08:13 AM	Tube furnace set to 150
9/25/2011	12:08:43 AM	H2 valve closed
9/25/2011	12:08:43 AM	BCl3 valve closed
9/25/2011	12:08:43 AM	PH3 valve closed
9/25/2011	12:08:43 AM	SiCl4 pre valve closed
9/25/2011	12:08:43 AM	SiCl4 post valve closed
9/25/2011	12:08:43 AM	Bypass valve closed
9/25/2011	12:08:43 AM	Bubbler valve closed
9/25/2011	12:08:43 AM	Helium valve opened
9/25/2011	12:08:43 AM	Main Vac valve opened
9/25/2011	12:08:43 AM	Helium MFC set to  20.000000
9/25/2011	12:08:43 AM	H2 MFC set to  0.000000
9/25/2011	12:08:43 AM	BCl3 MFC set to  0.000000
9/25/2011	12:08:43 AM	PHl3 MFC set to  0.000000
9/25/2011	12:08:43 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:08:43 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:08:44 AM	Tube furnace set to 150
9/25/2011	12:09:14 AM	Helium valve closed
9/25/2011	12:09:14 AM	H2 valve closed
9/25/2011	12:09:14 AM	BCl3 valve closed
9/25/2011	12:09:14 AM	PH3 valve closed
9/25/2011	12:09:14 AM	SiCl4 pre valve closed
9/25/2011	12:09:14 AM	SiCl4 post valve closed
9/25/2011	12:09:14 AM	Bypass valve closed
9/25/2011	12:09:14 AM	Bubbler valve closed
9/25/2011	12:09:14 AM	Main Vac valve opened
9/25/2011	12:09:14 AM	Helium MFC set to  0.000000
9/25/2011	12:09:14 AM	H2 MFC set to  0.000000
9/25/2011	12:09:14 AM	BCl3 MFC set to  0.000000
9/25/2011	12:09:14 AM	PHl3 MFC set to  0.000000
9/25/2011	12:09:14 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:09:14 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:09:14 AM	Tube furnace set to 150
9/25/2011	12:09:44 AM	H2 valve closed
9/25/2011	12:09:44 AM	BCl3 valve closed
9/25/2011	12:09:44 AM	PH3 valve closed
9/25/2011	12:09:44 AM	SiCl4 pre valve closed
9/25/2011	12:09:44 AM	SiCl4 post valve closed
9/25/2011	12:09:44 AM	Bypass valve closed
9/25/2011	12:09:44 AM	Bubbler valve closed
9/25/2011	12:09:44 AM	Helium valve opened
9/25/2011	12:09:44 AM	Main Vac valve opened
9/25/2011	12:09:44 AM	Helium MFC set to  20.000000
9/25/2011	12:09:44 AM	H2 MFC set to  0.000000
9/25/2011	12:09:44 AM	BCl3 MFC set to  0.000000
9/25/2011	12:09:44 AM	PHl3 MFC set to  0.000000
9/25/2011	12:09:44 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:09:44 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:09:44 AM	Tube furnace set to 150
9/25/2011	12:10:14 AM	Helium valve closed
9/25/2011	12:10:14 AM	H2 valve closed
9/25/2011	12:10:14 AM	BCl3 valve closed
9/25/2011	12:10:14 AM	PH3 valve closed
9/25/2011	12:10:14 AM	SiCl4 pre valve closed
9/25/2011	12:10:14 AM	SiCl4 post valve closed
9/25/2011	12:10:14 AM	Bypass valve closed
9/25/2011	12:10:14 AM	Bubbler valve closed
9/25/2011	12:10:14 AM	Main Vac valve opened
9/25/2011	12:10:14 AM	Helium MFC set to  0.000000
9/25/2011	12:10:14 AM	H2 MFC set to  0.000000
9/25/2011	12:10:14 AM	BCl3 MFC set to  0.000000
9/25/2011	12:10:14 AM	PHl3 MFC set to  0.000000
9/25/2011	12:10:14 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:10:14 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:10:14 AM	Tube furnace set to 150
9/25/2011	12:10:19 AM	Run finished at 12:10 AM
9/25/2011	12:11:37 AM	Main Vac valve closed
9/25/2011	12:11:45 AM	Main Vac valve opened
9/25/2011	12:13:29 AM	Recipe started at 12:13 AM
9/25/2011	12:13:29 AM	Helium valve closed
9/25/2011	12:13:29 AM	H2 valve closed
9/25/2011	12:13:29 AM	BCl3 valve closed
9/25/2011	12:13:29 AM	PH3 valve closed
9/25/2011	12:13:29 AM	SiCl4 pre valve closed
9/25/2011	12:13:29 AM	SiCl4 post valve closed
9/25/2011	12:13:29 AM	Main Vac valve closed
9/25/2011	12:13:29 AM	Bypass valve closed
9/25/2011	12:13:29 AM	Bubbler valve closed
9/25/2011	12:13:29 AM	Helium MFC set to  0.000000
9/25/2011	12:13:29 AM	H2 MFC set to  0.000000
9/25/2011	12:13:29 AM	BCl3 MFC set to  0.000000
9/25/2011	12:13:29 AM	PHl3 MFC set to  0.000000
9/25/2011	12:13:29 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:13:29 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:13:29 AM	Tube furnace set to 0
9/25/2011	12:13:32 AM	Helium valve closed
9/25/2011	12:13:32 AM	BCl3 valve closed
9/25/2011	12:13:32 AM	PH3 valve closed
9/25/2011	12:13:32 AM	SiCl4 pre valve closed
9/25/2011	12:13:32 AM	SiCl4 post valve closed
9/25/2011	12:13:32 AM	Main Vac valve closed
9/25/2011	12:13:32 AM	Bypass valve closed
9/25/2011	12:13:32 AM	Bubbler valve closed
9/25/2011	12:13:32 AM	H2 valve opened
9/25/2011	12:13:32 AM	Helium MFC set to  0.000000
9/25/2011	12:13:32 AM	H2 MFC set to  500.000000
9/25/2011	12:13:32 AM	BCl3 MFC set to  0.000000
9/25/2011	12:13:32 AM	PHl3 MFC set to  0.000000
9/25/2011	12:13:32 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:13:32 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:13:32 AM	Tube furnace set to 0
9/25/2011	12:14:34 AM	Helium valve closed
9/25/2011	12:14:34 AM	BCl3 valve closed
9/25/2011	12:14:34 AM	PH3 valve closed
9/25/2011	12:14:34 AM	SiCl4 pre valve closed
9/25/2011	12:14:34 AM	SiCl4 post valve closed
9/25/2011	12:14:34 AM	Main Vac valve closed
9/25/2011	12:14:34 AM	Bypass valve closed
9/25/2011	12:14:34 AM	H2 valve opened
9/25/2011	12:14:34 AM	Bubbler valve opened
9/25/2011	12:14:34 AM	Helium MFC set to  0.000000
9/25/2011	12:14:34 AM	H2 MFC set to  500.000000
9/25/2011	12:14:34 AM	BCl3 MFC set to  0.000000
9/25/2011	12:14:34 AM	PHl3 MFC set to  0.000000
9/25/2011	12:14:34 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:14:34 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:14:35 AM	Tube furnace set to 0
9/25/2011	12:14:36 AM	Helium valve closed
9/25/2011	12:14:36 AM	BCl3 valve closed
9/25/2011	12:14:36 AM	PH3 valve closed
9/25/2011	12:14:36 AM	SiCl4 pre valve closed
9/25/2011	12:14:36 AM	SiCl4 post valve closed
9/25/2011	12:14:36 AM	Main Vac valve closed
9/25/2011	12:14:36 AM	Bypass valve closed
9/25/2011	12:14:36 AM	H2 valve opened
9/25/2011	12:14:36 AM	Bubbler valve opened
9/25/2011	12:14:36 AM	Helium MFC set to  0.000000
9/25/2011	12:14:36 AM	H2 MFC set to  500.000000
9/25/2011	12:14:36 AM	BCl3 MFC set to  0.000000
9/25/2011	12:14:36 AM	PHl3 MFC set to  0.000000
9/25/2011	12:14:36 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:14:36 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:14:36 AM	Tube furnace set to 1000
9/25/2011	12:24:08 AM	Helium valve closed
9/25/2011	12:24:08 AM	BCl3 valve closed
9/25/2011	12:24:08 AM	PH3 valve closed
9/25/2011	12:24:08 AM	Main Vac valve closed
9/25/2011	12:24:08 AM	Bypass valve closed
9/25/2011	12:24:08 AM	H2 valve opened
9/25/2011	12:24:08 AM	SiCl4 pre valve opened
9/25/2011	12:24:08 AM	SiCl4 post valve opened
9/25/2011	12:24:08 AM	Bubbler valve opened
9/25/2011	12:24:08 AM	Helium MFC set to  0.000000
9/25/2011	12:24:08 AM	H2 MFC set to  500.000000
9/25/2011	12:24:08 AM	BCl3 MFC set to  0.000000
9/25/2011	12:24:08 AM	PHl3 MFC set to  0.000000
9/25/2011	12:24:08 AM	SiCl4 MFC set to  50.000000
9/25/2011	12:24:08 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:24:08 AM	Tube furnace set to 1000
9/25/2011	12:34:08 AM	Helium valve closed
9/25/2011	12:34:08 AM	BCl3 valve closed
9/25/2011	12:34:08 AM	PH3 valve closed
9/25/2011	12:34:08 AM	SiCl4 pre valve closed
9/25/2011	12:34:08 AM	SiCl4 post valve closed
9/25/2011	12:34:08 AM	Main Vac valve closed
9/25/2011	12:34:08 AM	Bypass valve closed
9/25/2011	12:34:08 AM	H2 valve opened
9/25/2011	12:34:08 AM	Bubbler valve opened
9/25/2011	12:34:08 AM	Helium MFC set to  0.000000
9/25/2011	12:34:08 AM	H2 MFC set to  500.000000
9/25/2011	12:34:08 AM	BCl3 MFC set to  0.000000
9/25/2011	12:34:08 AM	PHl3 MFC set to  0.000000
9/25/2011	12:34:08 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:34:08 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:34:08 AM	Tube furnace set to 750
9/25/2011	12:39:08 AM	H2 valve closed
9/25/2011	12:39:08 AM	BCl3 valve closed
9/25/2011	12:39:08 AM	PH3 valve closed
9/25/2011	12:39:08 AM	SiCl4 pre valve closed
9/25/2011	12:39:08 AM	SiCl4 post valve closed
9/25/2011	12:39:08 AM	Main Vac valve closed
9/25/2011	12:39:08 AM	Bypass valve closed
9/25/2011	12:39:08 AM	Helium valve opened
9/25/2011	12:39:08 AM	Bubbler valve opened
9/25/2011	12:39:08 AM	Helium MFC set to  500.000000
9/25/2011	12:39:08 AM	H2 MFC set to  0.000000
9/25/2011	12:39:08 AM	BCl3 MFC set to  0.000000
9/25/2011	12:39:08 AM	PHl3 MFC set to  0.000000
9/25/2011	12:39:08 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:39:08 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:39:08 AM	Tube furnace set to 0
9/25/2011	12:42:27 AM	Run aborted at 12:42 AM
9/25/2011	12:42:27 AM	Helium valve closed
9/25/2011	12:42:27 AM	H2 valve closed
9/25/2011	12:42:27 AM	BCl3 valve closed
9/25/2011	12:42:27 AM	PH3 valve closed
9/25/2011	12:42:27 AM	SiCl4 pre valve closed
9/25/2011	12:42:27 AM	SiCl4 post valve closed
9/25/2011	12:42:27 AM	Bypass valve closed
9/25/2011	12:42:27 AM	Main Vac valve closed
9/25/2011	12:42:27 AM	Bubbler valve closed
9/25/2011	12:42:27 AM	Helium MFC set to  0.000000
9/25/2011	12:42:27 AM	H2 MFC set to  0.000000
9/25/2011	12:42:27 AM	BCl3 MFC set to  0.000000
9/25/2011	12:42:27 AM	PHl3 MFC set to  0.000000
9/25/2011	12:42:27 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:42:27 AM	Tube furnace set to 0
9/25/2011	12:42:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/25/2011	12:42:30 AM	Recipe started at 12:42 AM
9/25/2011	12:42:30 AM	Helium valve closed
9/25/2011	12:42:30 AM	H2 valve closed
9/25/2011	12:42:30 AM	BCl3 valve closed
9/25/2011	12:42:30 AM	PH3 valve closed
9/25/2011	12:42:30 AM	SiCl4 pre valve closed
9/25/2011	12:42:30 AM	SiCl4 post valve closed
9/25/2011	12:42:30 AM	Main Vac valve closed
9/25/2011	12:42:30 AM	Bypass valve closed
9/25/2011	12:42:30 AM	Bubbler valve closed
9/25/2011	12:42:30 AM	Helium MFC set to  0.000000
9/25/2011	12:42:30 AM	H2 MFC set to  0.000000
9/25/2011	12:42:30 AM	BCl3 MFC set to  0.000000
9/25/2011	12:42:30 AM	PHl3 MFC set to  0.000000
9/25/2011	12:42:30 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:42:30 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:42:30 AM	Tube furnace set to 0
9/25/2011	12:42:33 AM	H2 valve closed
9/25/2011	12:42:33 AM	BCl3 valve closed
9/25/2011	12:42:33 AM	PH3 valve closed
9/25/2011	12:42:33 AM	SiCl4 pre valve closed
9/25/2011	12:42:33 AM	SiCl4 post valve closed
9/25/2011	12:42:33 AM	Main Vac valve closed
9/25/2011	12:42:33 AM	Bypass valve closed
9/25/2011	12:42:33 AM	Bubbler valve closed
9/25/2011	12:42:33 AM	Helium valve opened
9/25/2011	12:42:33 AM	Helium MFC set to  500.000000
9/25/2011	12:42:33 AM	H2 MFC set to  0.000000
9/25/2011	12:42:33 AM	BCl3 MFC set to  0.000000
9/25/2011	12:42:33 AM	PHl3 MFC set to  0.000000
9/25/2011	12:42:33 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:42:33 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:42:33 AM	Tube furnace set to 0
9/25/2011	12:42:33 AM	Helium valve closed
9/25/2011	12:42:33 AM	H2 valve closed
9/25/2011	12:42:33 AM	BCl3 valve closed
9/25/2011	12:42:33 AM	PH3 valve closed
9/25/2011	12:42:33 AM	SiCl4 pre valve closed
9/25/2011	12:42:33 AM	SiCl4 post valve closed
9/25/2011	12:42:33 AM	Main Vac valve closed
9/25/2011	12:42:33 AM	Bypass valve closed
9/25/2011	12:42:33 AM	Bubbler valve closed
9/25/2011	12:42:33 AM	Helium MFC set to  0.000000
9/25/2011	12:42:33 AM	H2 MFC set to  0.000000
9/25/2011	12:42:33 AM	BCl3 MFC set to  0.000000
9/25/2011	12:42:33 AM	PHl3 MFC set to  0.000000
9/25/2011	12:42:33 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:42:33 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:42:33 AM	Tube furnace set to 0
9/25/2011	12:42:34 AM	Run finished at 12:42 AM
9/25/2011	12:42:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/25/2011	12:48:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/25/2011	12:48:12 AM	Recipe started at 12:48 AM
9/25/2011	12:48:12 AM	Helium valve closed
9/25/2011	12:48:12 AM	H2 valve closed
9/25/2011	12:48:12 AM	BCl3 valve closed
9/25/2011	12:48:12 AM	PH3 valve closed
9/25/2011	12:48:12 AM	SiCl4 pre valve closed
9/25/2011	12:48:12 AM	SiCl4 post valve closed
9/25/2011	12:48:12 AM	Main Vac valve closed
9/25/2011	12:48:12 AM	Bubbler valve closed
9/25/2011	12:48:12 AM	Bypass valve opened
9/25/2011	12:48:12 AM	Helium MFC set to  0.000000
9/25/2011	12:48:12 AM	H2 MFC set to  0.000000
9/25/2011	12:48:12 AM	BCl3 MFC set to  0.000000
9/25/2011	12:48:12 AM	PHl3 MFC set to  0.000000
9/25/2011	12:48:12 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:48:12 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:48:13 AM	Tube furnace set to 0
9/25/2011	12:49:12 AM	Helium valve closed
9/25/2011	12:49:12 AM	H2 valve closed
9/25/2011	12:49:12 AM	BCl3 valve closed
9/25/2011	12:49:12 AM	PH3 valve closed
9/25/2011	12:49:12 AM	SiCl4 pre valve closed
9/25/2011	12:49:12 AM	SiCl4 post valve closed
9/25/2011	12:49:12 AM	Main Vac valve closed
9/25/2011	12:49:12 AM	Bubbler valve closed
9/25/2011	12:49:12 AM	Bypass valve opened
9/25/2011	12:49:12 AM	Helium MFC set to  0.000000
9/25/2011	12:49:12 AM	H2 MFC set to  0.000000
9/25/2011	12:49:12 AM	BCl3 MFC set to  0.000000
9/25/2011	12:49:12 AM	PHl3 MFC set to  0.000000
9/25/2011	12:49:12 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:49:12 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:49:12 AM	Tube furnace set to 0
9/25/2011	12:50:13 AM	Helium valve closed
9/25/2011	12:50:13 AM	H2 valve closed
9/25/2011	12:50:13 AM	BCl3 valve closed
9/25/2011	12:50:13 AM	PH3 valve closed
9/25/2011	12:50:13 AM	SiCl4 pre valve closed
9/25/2011	12:50:13 AM	SiCl4 post valve closed
9/25/2011	12:50:13 AM	Bypass valve closed
9/25/2011	12:50:13 AM	Bubbler valve closed
9/25/2011	12:50:13 AM	Main Vac valve opened
9/25/2011	12:50:13 AM	Helium MFC set to  0.000000
9/25/2011	12:50:13 AM	H2 MFC set to  0.000000
9/25/2011	12:50:13 AM	BCl3 MFC set to  0.000000
9/25/2011	12:50:13 AM	PHl3 MFC set to  0.000000
9/25/2011	12:50:13 AM	SiCl4 MFC set to  0.000000
9/25/2011	12:50:13 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	12:50:13 AM	Tube furnace set to 0
9/25/2011	12:50:14 AM	Run finished at 12:50 AM
9/25/2011	12:50:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/25/2011	7:52:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/25/2011	7:52:27 AM	Recipe started at 7:52 AM
9/25/2011	7:52:27 AM	Helium valve closed
9/25/2011	7:52:27 AM	H2 valve closed
9/25/2011	7:52:27 AM	BCl3 valve closed
9/25/2011	7:52:27 AM	PH3 valve closed
9/25/2011	7:52:27 AM	SiCl4 pre valve closed
9/25/2011	7:52:27 AM	SiCl4 post valve closed
9/25/2011	7:52:27 AM	Main Vac valve closed
9/25/2011	7:52:27 AM	Bypass valve closed
9/25/2011	7:52:27 AM	Bubbler valve closed
9/25/2011	7:52:27 AM	Helium MFC set to  0.000000
9/25/2011	7:52:27 AM	H2 MFC set to  0.000000
9/25/2011	7:52:27 AM	BCl3 MFC set to  0.000000
9/25/2011	7:52:27 AM	PHl3 MFC set to  0.000000
9/25/2011	7:52:27 AM	SiCl4 MFC set to  0.000000
9/25/2011	7:52:27 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	7:52:27 AM	Tube furnace set to 0
9/25/2011	7:52:30 AM	H2 valve closed
9/25/2011	7:52:30 AM	BCl3 valve closed
9/25/2011	7:52:30 AM	PH3 valve closed
9/25/2011	7:52:30 AM	SiCl4 pre valve closed
9/25/2011	7:52:30 AM	SiCl4 post valve closed
9/25/2011	7:52:30 AM	Main Vac valve closed
9/25/2011	7:52:30 AM	Bypass valve closed
9/25/2011	7:52:30 AM	Bubbler valve closed
9/25/2011	7:52:30 AM	Helium valve opened
9/25/2011	7:52:30 AM	Helium MFC set to  500.000000
9/25/2011	7:52:30 AM	H2 MFC set to  0.000000
9/25/2011	7:52:30 AM	BCl3 MFC set to  0.000000
9/25/2011	7:52:30 AM	PHl3 MFC set to  0.000000
9/25/2011	7:52:30 AM	SiCl4 MFC set to  0.000000
9/25/2011	7:52:30 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	7:52:30 AM	Tube furnace set to 0
9/25/2011	7:53:36 AM	Helium valve closed
9/25/2011	7:53:36 AM	H2 valve closed
9/25/2011	7:53:36 AM	BCl3 valve closed
9/25/2011	7:53:36 AM	PH3 valve closed
9/25/2011	7:53:36 AM	SiCl4 pre valve closed
9/25/2011	7:53:36 AM	SiCl4 post valve closed
9/25/2011	7:53:36 AM	Main Vac valve closed
9/25/2011	7:53:36 AM	Bypass valve closed
9/25/2011	7:53:36 AM	Bubbler valve closed
9/25/2011	7:53:36 AM	Helium MFC set to  0.000000
9/25/2011	7:53:36 AM	H2 MFC set to  0.000000
9/25/2011	7:53:36 AM	BCl3 MFC set to  0.000000
9/25/2011	7:53:36 AM	PHl3 MFC set to  0.000000
9/25/2011	7:53:36 AM	SiCl4 MFC set to  0.000000
9/25/2011	7:53:36 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	7:53:36 AM	Tube furnace set to 0
9/25/2011	7:53:37 AM	Run finished at 7:53 AM
9/25/2011	7:53:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/25/2011	7:55:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/25/2011	7:55:12 AM	Recipe started at 7:55 AM
9/25/2011	7:55:12 AM	Helium valve closed
9/25/2011	7:55:12 AM	H2 valve closed
9/25/2011	7:55:12 AM	BCl3 valve closed
9/25/2011	7:55:12 AM	PH3 valve closed
9/25/2011	7:55:12 AM	SiCl4 pre valve closed
9/25/2011	7:55:12 AM	SiCl4 post valve closed
9/25/2011	7:55:12 AM	Main Vac valve closed
9/25/2011	7:55:12 AM	Bubbler valve closed
9/25/2011	7:55:12 AM	Bypass valve opened
9/25/2011	7:55:12 AM	Helium MFC set to  0.000000
9/25/2011	7:55:12 AM	H2 MFC set to  0.000000
9/25/2011	7:55:12 AM	BCl3 MFC set to  0.000000
9/25/2011	7:55:12 AM	PHl3 MFC set to  0.000000
9/25/2011	7:55:12 AM	SiCl4 MFC set to  0.000000
9/25/2011	7:55:12 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	7:55:13 AM	Tube furnace set to 0
9/25/2011	7:56:16 AM	Helium valve closed
9/25/2011	7:56:16 AM	H2 valve closed
9/25/2011	7:56:16 AM	BCl3 valve closed
9/25/2011	7:56:16 AM	PH3 valve closed
9/25/2011	7:56:16 AM	SiCl4 pre valve closed
9/25/2011	7:56:16 AM	SiCl4 post valve closed
9/25/2011	7:56:16 AM	Main Vac valve closed
9/25/2011	7:56:16 AM	Bubbler valve closed
9/25/2011	7:56:16 AM	Bypass valve opened
9/25/2011	7:56:16 AM	Helium MFC set to  0.000000
9/25/2011	7:56:16 AM	H2 MFC set to  0.000000
9/25/2011	7:56:16 AM	BCl3 MFC set to  0.000000
9/25/2011	7:56:16 AM	PHl3 MFC set to  0.000000
9/25/2011	7:56:16 AM	SiCl4 MFC set to  0.000000
9/25/2011	7:56:16 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	7:56:16 AM	Tube furnace set to 0
9/25/2011	7:57:16 AM	Helium valve closed
9/25/2011	7:57:16 AM	H2 valve closed
9/25/2011	7:57:16 AM	BCl3 valve closed
9/25/2011	7:57:16 AM	PH3 valve closed
9/25/2011	7:57:16 AM	SiCl4 pre valve closed
9/25/2011	7:57:16 AM	SiCl4 post valve closed
9/25/2011	7:57:16 AM	Bypass valve closed
9/25/2011	7:57:16 AM	Bubbler valve closed
9/25/2011	7:57:16 AM	Main Vac valve opened
9/25/2011	7:57:16 AM	Helium MFC set to  0.000000
9/25/2011	7:57:16 AM	H2 MFC set to  0.000000
9/25/2011	7:57:16 AM	BCl3 MFC set to  0.000000
9/25/2011	7:57:16 AM	PHl3 MFC set to  0.000000
9/25/2011	7:57:16 AM	SiCl4 MFC set to  0.000000
9/25/2011	7:57:16 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	7:57:17 AM	Tube furnace set to 0
9/25/2011	7:57:18 AM	Run finished at 7:57 AM
9/25/2011	7:57:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/25/2011	9:43:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/25/2011	9:43:15 AM	Recipe started at 9:43 AM
9/25/2011	9:43:15 AM	Helium valve closed
9/25/2011	9:43:15 AM	H2 valve closed
9/25/2011	9:43:15 AM	BCl3 valve closed
9/25/2011	9:43:15 AM	PH3 valve closed
9/25/2011	9:43:15 AM	SiCl4 pre valve closed
9/25/2011	9:43:15 AM	SiCl4 post valve closed
9/25/2011	9:43:15 AM	Main Vac valve closed
9/25/2011	9:43:15 AM	Bypass valve closed
9/25/2011	9:43:15 AM	Bubbler valve closed
9/25/2011	9:43:15 AM	Helium MFC set to  0.000000
9/25/2011	9:43:15 AM	H2 MFC set to  0.000000
9/25/2011	9:43:15 AM	BCl3 MFC set to  0.000000
9/25/2011	9:43:15 AM	PHl3 MFC set to  0.000000
9/25/2011	9:43:15 AM	SiCl4 MFC set to  0.000000
9/25/2011	9:43:15 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	9:43:16 AM	Tube furnace set to 0
9/25/2011	9:43:16 AM	Run finished at 9:43 AM
9/25/2011	9:43:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/25/2011	9:43:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/25/2011	9:43:28 AM	Recipe started at 9:43 AM
9/25/2011	9:43:28 AM	Helium valve closed
9/25/2011	9:43:28 AM	H2 valve closed
9/25/2011	9:43:28 AM	BCl3 valve closed
9/25/2011	9:43:28 AM	PH3 valve closed
9/25/2011	9:43:28 AM	SiCl4 pre valve closed
9/25/2011	9:43:28 AM	SiCl4 post valve closed
9/25/2011	9:43:28 AM	Main Vac valve closed
9/25/2011	9:43:28 AM	Bubbler valve closed
9/25/2011	9:43:28 AM	Bypass valve opened
9/25/2011	9:43:28 AM	Helium MFC set to  0.000000
9/25/2011	9:43:28 AM	H2 MFC set to  0.000000
9/25/2011	9:43:28 AM	BCl3 MFC set to  0.000000
9/25/2011	9:43:28 AM	PHl3 MFC set to  0.000000
9/25/2011	9:43:28 AM	SiCl4 MFC set to  0.000000
9/25/2011	9:43:28 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	9:43:28 AM	Tube furnace set to 0
9/25/2011	9:43:28 AM	Helium valve closed
9/25/2011	9:43:28 AM	H2 valve closed
9/25/2011	9:43:28 AM	BCl3 valve closed
9/25/2011	9:43:28 AM	PH3 valve closed
9/25/2011	9:43:28 AM	SiCl4 pre valve closed
9/25/2011	9:43:28 AM	SiCl4 post valve closed
9/25/2011	9:43:28 AM	Main Vac valve closed
9/25/2011	9:43:28 AM	Bubbler valve closed
9/25/2011	9:43:28 AM	Bypass valve opened
9/25/2011	9:43:28 AM	Helium MFC set to  0.000000
9/25/2011	9:43:28 AM	H2 MFC set to  0.000000
9/25/2011	9:43:28 AM	BCl3 MFC set to  0.000000
9/25/2011	9:43:28 AM	PHl3 MFC set to  0.000000
9/25/2011	9:43:28 AM	SiCl4 MFC set to  0.000000
9/25/2011	9:43:28 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	9:43:28 AM	Tube furnace set to 0
9/25/2011	9:43:29 AM	Helium valve closed
9/25/2011	9:43:29 AM	H2 valve closed
9/25/2011	9:43:29 AM	BCl3 valve closed
9/25/2011	9:43:29 AM	PH3 valve closed
9/25/2011	9:43:29 AM	SiCl4 pre valve closed
9/25/2011	9:43:29 AM	SiCl4 post valve closed
9/25/2011	9:43:29 AM	Bypass valve closed
9/25/2011	9:43:29 AM	Bubbler valve closed
9/25/2011	9:43:29 AM	Main Vac valve opened
9/25/2011	9:43:29 AM	Helium MFC set to  0.000000
9/25/2011	9:43:29 AM	H2 MFC set to  0.000000
9/25/2011	9:43:29 AM	BCl3 MFC set to  0.000000
9/25/2011	9:43:29 AM	PHl3 MFC set to  0.000000
9/25/2011	9:43:29 AM	SiCl4 MFC set to  0.000000
9/25/2011	9:43:29 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	9:43:29 AM	Tube furnace set to 0
9/25/2011	9:43:30 AM	Run finished at 9:43 AM
9/25/2011	9:43:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/25/2011	9:44:09 AM	Recipe started at 9:44 AM
9/25/2011	9:44:09 AM	Helium valve closed
9/25/2011	9:44:09 AM	H2 valve closed
9/25/2011	9:44:09 AM	BCl3 valve closed
9/25/2011	9:44:09 AM	PH3 valve closed
9/25/2011	9:44:09 AM	SiCl4 pre valve closed
9/25/2011	9:44:09 AM	SiCl4 post valve closed
9/25/2011	9:44:09 AM	Main Vac valve closed
9/25/2011	9:44:09 AM	Bypass valve closed
9/25/2011	9:44:09 AM	Bubbler valve closed
9/25/2011	9:44:09 AM	Helium MFC set to  0.000000
9/25/2011	9:44:09 AM	H2 MFC set to  0.000000
9/25/2011	9:44:09 AM	BCl3 MFC set to  0.000000
9/25/2011	9:44:10 AM	PHl3 MFC set to  0.000000
9/25/2011	9:44:10 AM	SiCl4 MFC set to  0.000000
9/25/2011	9:44:10 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	9:44:10 AM	Tube furnace set to 0
9/25/2011	9:44:13 AM	Helium valve closed
9/25/2011	9:44:13 AM	BCl3 valve closed
9/25/2011	9:44:13 AM	PH3 valve closed
9/25/2011	9:44:13 AM	SiCl4 pre valve closed
9/25/2011	9:44:13 AM	SiCl4 post valve closed
9/25/2011	9:44:13 AM	Main Vac valve closed
9/25/2011	9:44:13 AM	Bypass valve closed
9/25/2011	9:44:13 AM	Bubbler valve closed
9/25/2011	9:44:13 AM	H2 valve opened
9/25/2011	9:44:13 AM	Helium MFC set to  0.000000
9/25/2011	9:44:13 AM	H2 MFC set to  500.000000
9/25/2011	9:44:13 AM	BCl3 MFC set to  0.000000
9/25/2011	9:44:13 AM	PHl3 MFC set to  0.000000
9/25/2011	9:44:13 AM	SiCl4 MFC set to  0.000000
9/25/2011	9:44:13 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	9:44:13 AM	Tube furnace set to 0
9/25/2011	9:45:21 AM	Helium valve closed
9/25/2011	9:45:21 AM	BCl3 valve closed
9/25/2011	9:45:21 AM	PH3 valve closed
9/25/2011	9:45:21 AM	SiCl4 pre valve closed
9/25/2011	9:45:21 AM	SiCl4 post valve closed
9/25/2011	9:45:21 AM	Main Vac valve closed
9/25/2011	9:45:21 AM	Bypass valve closed
9/25/2011	9:45:21 AM	H2 valve opened
9/25/2011	9:45:21 AM	Bubbler valve opened
9/25/2011	9:45:21 AM	Helium MFC set to  0.000000
9/25/2011	9:45:21 AM	H2 MFC set to  500.000000
9/25/2011	9:45:21 AM	BCl3 MFC set to  0.000000
9/25/2011	9:45:21 AM	PHl3 MFC set to  0.000000
9/25/2011	9:45:21 AM	SiCl4 MFC set to  0.000000
9/25/2011	9:45:21 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	9:45:21 AM	Tube furnace set to 0
9/25/2011	9:45:22 AM	Helium valve closed
9/25/2011	9:45:22 AM	BCl3 valve closed
9/25/2011	9:45:22 AM	PH3 valve closed
9/25/2011	9:45:22 AM	SiCl4 pre valve closed
9/25/2011	9:45:22 AM	SiCl4 post valve closed
9/25/2011	9:45:22 AM	Main Vac valve closed
9/25/2011	9:45:22 AM	Bypass valve closed
9/25/2011	9:45:22 AM	H2 valve opened
9/25/2011	9:45:22 AM	Bubbler valve opened
9/25/2011	9:45:22 AM	Helium MFC set to  0.000000
9/25/2011	9:45:22 AM	H2 MFC set to  500.000000
9/25/2011	9:45:22 AM	BCl3 MFC set to  0.000000
9/25/2011	9:45:22 AM	PHl3 MFC set to  0.000000
9/25/2011	9:45:22 AM	SiCl4 MFC set to  0.000000
9/25/2011	9:45:22 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	9:45:22 AM	Tube furnace set to 1000
9/25/2011	10:05:22 AM	Helium valve closed
9/25/2011	10:05:22 AM	PH3 valve closed
9/25/2011	10:05:22 AM	SiCl4 post valve closed
9/25/2011	10:05:22 AM	Main Vac valve closed
9/25/2011	10:05:22 AM	Bypass valve closed
9/25/2011	10:05:22 AM	H2 valve opened
9/25/2011	10:05:22 AM	BCl3 valve opened
9/25/2011	10:05:22 AM	SiCl4 pre valve opened
9/25/2011	10:05:22 AM	Bubbler valve opened
9/25/2011	10:05:22 AM	Helium MFC set to  0.000000
9/25/2011	10:05:22 AM	H2 MFC set to  500.000000
9/25/2011	10:05:22 AM	BCl3 MFC set to  2.000000
9/25/2011	10:05:22 AM	PHl3 MFC set to  0.000000
9/25/2011	10:05:22 AM	SiCl4 MFC set to  50.000000
9/25/2011	10:05:22 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	10:05:22 AM	Tube furnace set to 1000
9/25/2011	10:05:24 AM	Helium valve closed
9/25/2011	10:05:24 AM	PH3 valve closed
9/25/2011	10:05:24 AM	Main Vac valve closed
9/25/2011	10:05:24 AM	Bypass valve closed
9/25/2011	10:05:24 AM	H2 valve opened
9/25/2011	10:05:24 AM	BCl3 valve opened
9/25/2011	10:05:24 AM	SiCl4 pre valve opened
9/25/2011	10:05:24 AM	SiCl4 post valve opened
9/25/2011	10:05:24 AM	Bubbler valve opened
9/25/2011	10:05:24 AM	Helium MFC set to  0.000000
9/25/2011	10:05:24 AM	H2 MFC set to  500.000000
9/25/2011	10:05:24 AM	BCl3 MFC set to  2.000000
9/25/2011	10:05:24 AM	PHl3 MFC set to  0.000000
9/25/2011	10:05:24 AM	SiCl4 MFC set to  50.000000
9/25/2011	10:05:24 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	10:05:24 AM	Tube furnace set to 1000
9/25/2011	10:20:24 AM	Helium valve closed
9/25/2011	10:20:24 AM	BCl3 valve closed
9/25/2011	10:20:24 AM	PH3 valve closed
9/25/2011	10:20:24 AM	SiCl4 pre valve closed
9/25/2011	10:20:24 AM	SiCl4 post valve closed
9/25/2011	10:20:24 AM	Main Vac valve closed
9/25/2011	10:20:24 AM	Bypass valve closed
9/25/2011	10:20:24 AM	H2 valve opened
9/25/2011	10:20:24 AM	Bubbler valve opened
9/25/2011	10:20:24 AM	Helium MFC set to  0.000000
9/25/2011	10:20:24 AM	H2 MFC set to  500.000000
9/25/2011	10:20:24 AM	BCl3 MFC set to  0.000000
9/25/2011	10:20:24 AM	PHl3 MFC set to  0.000000
9/25/2011	10:20:24 AM	SiCl4 MFC set to  0.000000
9/25/2011	10:20:24 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	10:20:24 AM	Tube furnace set to 950
9/25/2011	10:25:24 AM	Helium valve closed
9/25/2011	10:25:24 AM	BCl3 valve closed
9/25/2011	10:25:24 AM	PH3 valve closed
9/25/2011	10:25:25 AM	SiCl4 pre valve closed
9/25/2011	10:25:25 AM	SiCl4 post valve closed
9/25/2011	10:25:25 AM	Main Vac valve closed
9/25/2011	10:25:25 AM	Bypass valve closed
9/25/2011	10:25:25 AM	H2 valve opened
9/25/2011	10:25:25 AM	Bubbler valve opened
9/25/2011	10:25:25 AM	Helium MFC set to  0.000000
9/25/2011	10:25:25 AM	H2 MFC set to  500.000000
9/25/2011	10:25:25 AM	BCl3 MFC set to  0.000000
9/25/2011	10:25:25 AM	PHl3 MFC set to  0.000000
9/25/2011	10:25:25 AM	SiCl4 MFC set to  0.000000
9/25/2011	10:25:25 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	10:25:25 AM	Tube furnace set to 850
9/25/2011	10:30:25 AM	H2 valve closed
9/25/2011	10:30:25 AM	BCl3 valve closed
9/25/2011	10:30:25 AM	PH3 valve closed
9/25/2011	10:30:25 AM	SiCl4 pre valve closed
9/25/2011	10:30:25 AM	SiCl4 post valve closed
9/25/2011	10:30:25 AM	Main Vac valve closed
9/25/2011	10:30:25 AM	Bypass valve closed
9/25/2011	10:30:25 AM	Helium valve opened
9/25/2011	10:30:25 AM	Bubbler valve opened
9/25/2011	10:30:25 AM	Helium MFC set to  500.000000
9/25/2011	10:30:25 AM	H2 MFC set to  0.000000
9/25/2011	10:30:25 AM	BCl3 MFC set to  0.000000
9/25/2011	10:30:25 AM	PHl3 MFC set to  0.000000
9/25/2011	10:30:25 AM	SiCl4 MFC set to  0.000000
9/25/2011	10:30:25 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	10:30:25 AM	Tube furnace set to 0
9/25/2011	10:44:26 AM	Helium valve closed
9/25/2011	10:44:26 AM	H2 valve closed
9/25/2011	10:44:26 AM	BCl3 valve closed
9/25/2011	10:44:26 AM	PH3 valve closed
9/25/2011	10:44:26 AM	SiCl4 pre valve closed
9/25/2011	10:44:26 AM	SiCl4 post valve closed
9/25/2011	10:44:26 AM	Main Vac valve closed
9/25/2011	10:44:26 AM	Bypass valve closed
9/25/2011	10:44:26 AM	Bubbler valve closed
9/25/2011	10:44:26 AM	Helium MFC set to  0.000000
9/25/2011	10:44:26 AM	H2 MFC set to  0.000000
9/25/2011	10:44:26 AM	BCl3 MFC set to  0.000000
9/25/2011	10:44:26 AM	PHl3 MFC set to  0.000000
9/25/2011	10:44:26 AM	SiCl4 MFC set to  0.000000
9/25/2011	10:44:26 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	10:44:26 AM	Tube furnace set to 0
9/25/2011	10:44:27 AM	Run finished at 10:44 AM
9/25/2011	10:46:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/25/2011	10:46:01 AM	Recipe started at 10:46 AM
9/25/2011	10:46:01 AM	Helium valve closed
9/25/2011	10:46:01 AM	H2 valve closed
9/25/2011	10:46:01 AM	BCl3 valve closed
9/25/2011	10:46:01 AM	PH3 valve closed
9/25/2011	10:46:01 AM	SiCl4 pre valve closed
9/25/2011	10:46:01 AM	SiCl4 post valve closed
9/25/2011	10:46:01 AM	Main Vac valve closed
9/25/2011	10:46:01 AM	Bubbler valve closed
9/25/2011	10:46:01 AM	Bypass valve opened
9/25/2011	10:46:01 AM	Helium MFC set to  0.000000
9/25/2011	10:46:01 AM	H2 MFC set to  0.000000
9/25/2011	10:46:01 AM	BCl3 MFC set to  0.000000
9/25/2011	10:46:01 AM	PHl3 MFC set to  0.000000
9/25/2011	10:46:01 AM	SiCl4 MFC set to  0.000000
9/25/2011	10:46:01 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	10:46:02 AM	Tube furnace set to 0
9/25/2011	10:46:56 AM	Helium valve closed
9/25/2011	10:46:56 AM	H2 valve closed
9/25/2011	10:46:56 AM	BCl3 valve closed
9/25/2011	10:46:56 AM	PH3 valve closed
9/25/2011	10:46:56 AM	SiCl4 pre valve closed
9/25/2011	10:46:56 AM	SiCl4 post valve closed
9/25/2011	10:46:56 AM	Main Vac valve closed
9/25/2011	10:46:56 AM	Bubbler valve closed
9/25/2011	10:46:56 AM	Bypass valve opened
9/25/2011	10:46:56 AM	Helium MFC set to  0.000000
9/25/2011	10:46:56 AM	H2 MFC set to  0.000000
9/25/2011	10:46:56 AM	BCl3 MFC set to  0.000000
9/25/2011	10:46:56 AM	PHl3 MFC set to  0.000000
9/25/2011	10:46:56 AM	SiCl4 MFC set to  0.000000
9/25/2011	10:46:56 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	10:46:56 AM	Tube furnace set to 0
9/25/2011	10:47:56 AM	Helium valve closed
9/25/2011	10:47:56 AM	H2 valve closed
9/25/2011	10:47:56 AM	BCl3 valve closed
9/25/2011	10:47:56 AM	PH3 valve closed
9/25/2011	10:47:56 AM	SiCl4 pre valve closed
9/25/2011	10:47:56 AM	SiCl4 post valve closed
9/25/2011	10:47:56 AM	Bypass valve closed
9/25/2011	10:47:56 AM	Bubbler valve closed
9/25/2011	10:47:56 AM	Main Vac valve opened
9/25/2011	10:47:56 AM	Helium MFC set to  0.000000
9/25/2011	10:47:56 AM	H2 MFC set to  0.000000
9/25/2011	10:47:56 AM	BCl3 MFC set to  0.000000
9/25/2011	10:47:56 AM	PHl3 MFC set to  0.000000
9/25/2011	10:47:56 AM	SiCl4 MFC set to  0.000000
9/25/2011	10:47:56 AM	Bypass solenoid MFC set to  0.000000
9/25/2011	10:47:56 AM	Tube furnace set to 0
9/25/2011	10:47:57 AM	Run finished at 10:47 AM
9/25/2011	10:47:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/25/2011	10:55:18 AM	H2 valve opened
9/25/2011	10:55:37 AM	H2 MFC set to  500.000000
9/25/2011	11:22:39 AM	H2 valve closed
9/25/2011	11:22:42 AM	H2 MFC set to  0.000000
9/25/2011	3:01:37 PM	H2 valve opened
9/25/2011	3:01:42 PM	H2 MFC set to  500.000000
9/25/2011	3:46:42 PM	H2 valve closed
9/25/2011	3:46:48 PM	H2 MFC set to  0.000000
9/25/2011	3:47:11 PM	H2 valve opened
9/25/2011	3:47:14 PM	H2 MFC set to  0.005000
9/25/2011	3:47:26 PM	H2 MFC set to  500.000000
9/25/2011	3:51:45 PM	H2 valve closed
9/25/2011	3:51:48 PM	H2 MFC set to  0.000000
9/25/2011	3:52:10 PM	H2 valve opened
9/25/2011	3:52:13 PM	H2 MFC set to  500.000000
9/25/2011	3:56:22 PM	H2 valve closed
9/25/2011	3:56:24 PM	H2 MFC set to  0.000000
9/25/2011	3:56:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/25/2011	3:56:40 PM	Recipe started at 3:56 PM
9/25/2011	3:56:40 PM	Helium valve closed
9/25/2011	3:56:40 PM	H2 valve closed
9/25/2011	3:56:40 PM	BCl3 valve closed
9/25/2011	3:56:40 PM	PH3 valve closed
9/25/2011	3:56:40 PM	SiCl4 pre valve closed
9/25/2011	3:56:40 PM	SiCl4 post valve closed
9/25/2011	3:56:40 PM	Main Vac valve closed
9/25/2011	3:56:40 PM	Bypass valve closed
9/25/2011	3:56:40 PM	Bubbler valve closed
9/25/2011	3:56:40 PM	Helium MFC set to  0.000000
9/25/2011	3:56:40 PM	H2 MFC set to  0.000000
9/25/2011	3:56:40 PM	BCl3 MFC set to  0.000000
9/25/2011	3:56:40 PM	PHl3 MFC set to  0.000000
9/25/2011	3:56:40 PM	SiCl4 MFC set to  0.000000
9/25/2011	3:56:40 PM	Bypass solenoid MFC set to  0.000000
9/25/2011	3:56:40 PM	Tube furnace set to 0
9/25/2011	3:56:43 PM	H2 valve closed
9/25/2011	3:56:43 PM	BCl3 valve closed
9/25/2011	3:56:43 PM	PH3 valve closed
9/25/2011	3:56:43 PM	SiCl4 pre valve closed
9/25/2011	3:56:43 PM	SiCl4 post valve closed
9/25/2011	3:56:43 PM	Main Vac valve closed
9/25/2011	3:56:43 PM	Bypass valve closed
9/25/2011	3:56:43 PM	Bubbler valve closed
9/25/2011	3:56:43 PM	Helium valve opened
9/25/2011	3:56:43 PM	Helium MFC set to  500.000000
9/25/2011	3:56:43 PM	H2 MFC set to  0.000000
9/25/2011	3:56:43 PM	BCl3 MFC set to  0.000000
9/25/2011	3:56:43 PM	PHl3 MFC set to  0.000000
9/25/2011	3:56:43 PM	SiCl4 MFC set to  0.000000
9/25/2011	3:56:43 PM	Bypass solenoid MFC set to  0.000000
9/25/2011	3:56:43 PM	Tube furnace set to 0
9/25/2011	3:57:49 PM	Helium valve closed
9/25/2011	3:57:49 PM	H2 valve closed
9/25/2011	3:57:49 PM	BCl3 valve closed
9/25/2011	3:57:49 PM	PH3 valve closed
9/25/2011	3:57:49 PM	SiCl4 pre valve closed
9/25/2011	3:57:49 PM	SiCl4 post valve closed
9/25/2011	3:57:49 PM	Main Vac valve closed
9/25/2011	3:57:49 PM	Bypass valve closed
9/25/2011	3:57:49 PM	Bubbler valve closed
9/25/2011	3:57:49 PM	Helium MFC set to  0.000000
9/25/2011	3:57:49 PM	H2 MFC set to  0.000000
9/25/2011	3:57:49 PM	BCl3 MFC set to  0.000000
9/25/2011	3:57:49 PM	PHl3 MFC set to  0.000000
9/25/2011	3:57:49 PM	SiCl4 MFC set to  0.000000
9/25/2011	3:57:49 PM	Bypass solenoid MFC set to  0.000000
9/25/2011	3:57:49 PM	Tube furnace set to 0
9/25/2011	3:57:50 PM	Run finished at 3:57 PM
9/25/2011	3:57:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/25/2011	3:59:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/25/2011	3:59:37 PM	Recipe started at 3:59 PM
9/25/2011	3:59:37 PM	Helium valve closed
9/25/2011	3:59:37 PM	H2 valve closed
9/25/2011	3:59:37 PM	BCl3 valve closed
9/25/2011	3:59:37 PM	PH3 valve closed
9/25/2011	3:59:37 PM	SiCl4 pre valve closed
9/25/2011	3:59:37 PM	SiCl4 post valve closed
9/25/2011	3:59:37 PM	Main Vac valve closed
9/25/2011	3:59:37 PM	Bubbler valve closed
9/25/2011	3:59:37 PM	Bypass valve opened
9/25/2011	3:59:37 PM	Helium MFC set to  0.000000
9/25/2011	3:59:37 PM	H2 MFC set to  0.000000
9/25/2011	3:59:37 PM	BCl3 MFC set to  0.000000
9/25/2011	3:59:37 PM	PHl3 MFC set to  0.000000
9/25/2011	3:59:37 PM	SiCl4 MFC set to  0.000000
9/25/2011	3:59:37 PM	Bypass solenoid MFC set to  0.000000
9/25/2011	3:59:37 PM	Tube furnace set to 0
9/25/2011	4:00:40 PM	Helium valve closed
9/25/2011	4:00:40 PM	H2 valve closed
9/25/2011	4:00:40 PM	BCl3 valve closed
9/25/2011	4:00:40 PM	PH3 valve closed
9/25/2011	4:00:40 PM	SiCl4 pre valve closed
9/25/2011	4:00:40 PM	SiCl4 post valve closed
9/25/2011	4:00:40 PM	Main Vac valve closed
9/25/2011	4:00:40 PM	Bubbler valve closed
9/25/2011	4:00:40 PM	Bypass valve opened
9/25/2011	4:00:40 PM	Helium MFC set to  0.000000
9/25/2011	4:00:40 PM	H2 MFC set to  0.000000
9/25/2011	4:00:40 PM	BCl3 MFC set to  0.000000
9/25/2011	4:00:40 PM	PHl3 MFC set to  0.000000
9/25/2011	4:00:40 PM	SiCl4 MFC set to  0.000000
9/25/2011	4:00:40 PM	Bypass solenoid MFC set to  0.000000
9/25/2011	4:00:40 PM	Tube furnace set to 0
9/25/2011	4:01:40 PM	Helium valve closed
9/25/2011	4:01:40 PM	H2 valve closed
9/25/2011	4:01:40 PM	BCl3 valve closed
9/25/2011	4:01:40 PM	PH3 valve closed
9/25/2011	4:01:40 PM	SiCl4 pre valve closed
9/25/2011	4:01:40 PM	SiCl4 post valve closed
9/25/2011	4:01:40 PM	Bypass valve closed
9/25/2011	4:01:40 PM	Bubbler valve closed
9/25/2011	4:01:40 PM	Main Vac valve opened
9/25/2011	4:01:40 PM	Helium MFC set to  0.000000
9/25/2011	4:01:40 PM	H2 MFC set to  0.000000
9/25/2011	4:01:40 PM	BCl3 MFC set to  0.000000
9/25/2011	4:01:40 PM	PHl3 MFC set to  0.000000
9/25/2011	4:01:40 PM	SiCl4 MFC set to  0.000000
9/25/2011	4:01:40 PM	Bypass solenoid MFC set to  0.000000
9/25/2011	4:01:40 PM	Tube furnace set to 0
9/25/2011	4:01:41 PM	Run finished at 4:01 PM
9/25/2011	4:01:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/25/2011	4:57:41 PM	Recipe started at 4:57 PM
9/25/2011	4:57:41 PM	Helium valve closed
9/25/2011	4:57:41 PM	H2 valve closed
9/25/2011	4:57:41 PM	BCl3 valve closed
9/25/2011	4:57:41 PM	PH3 valve closed
9/25/2011	4:57:41 PM	SiCl4 pre valve closed
9/25/2011	4:57:41 PM	SiCl4 post valve closed
9/25/2011	4:57:41 PM	Main Vac valve closed
9/25/2011	4:57:41 PM	Bypass valve closed
9/25/2011	4:57:41 PM	Bubbler valve closed
9/25/2011	4:57:41 PM	Helium MFC set to  0.000000
9/25/2011	4:57:41 PM	H2 MFC set to  0.000000
9/25/2011	4:57:41 PM	BCl3 MFC set to  0.000000
9/25/2011	4:57:41 PM	PHl3 MFC set to  0.000000
9/25/2011	4:57:41 PM	SiCl4 MFC set to  0.000000
9/25/2011	4:57:41 PM	Bypass solenoid MFC set to  0.000000
9/25/2011	4:57:41 PM	Tube furnace set to 0
9/25/2011	4:57:44 PM	Helium valve closed
9/25/2011	4:57:44 PM	BCl3 valve closed
9/25/2011	4:57:44 PM	PH3 valve closed
9/25/2011	4:57:44 PM	SiCl4 pre valve closed
9/25/2011	4:57:44 PM	SiCl4 post valve closed
9/25/2011	4:57:44 PM	Main Vac valve closed
9/25/2011	4:57:44 PM	Bypass valve closed
9/25/2011	4:57:44 PM	Bubbler valve closed
9/25/2011	4:57:44 PM	H2 valve opened
9/25/2011	4:57:44 PM	Helium MFC set to  0.000000
9/25/2011	4:57:44 PM	H2 MFC set to  500.000000
9/25/2011	4:57:44 PM	BCl3 MFC set to  0.000000
9/25/2011	4:57:44 PM	PHl3 MFC set to  0.000000
9/25/2011	4:57:44 PM	SiCl4 MFC set to  0.000000
9/25/2011	4:57:44 PM	Bypass solenoid MFC set to  0.000000
9/25/2011	4:57:44 PM	Tube furnace set to 0
9/25/2011	4:58:52 PM	Helium valve closed
9/25/2011	4:58:52 PM	BCl3 valve closed
9/25/2011	4:58:52 PM	PH3 valve closed
9/25/2011	4:58:52 PM	SiCl4 pre valve closed
9/25/2011	4:58:52 PM	SiCl4 post valve closed
9/25/2011	4:58:52 PM	Main Vac valve closed
9/25/2011	4:58:52 PM	Bypass valve closed
9/25/2011	4:58:52 PM	H2 valve opened
9/25/2011	4:58:52 PM	Bubbler valve opened
9/25/2011	4:58:52 PM	Helium MFC set to  0.000000
9/25/2011	4:58:52 PM	H2 MFC set to  500.000000
9/25/2011	4:58:52 PM	BCl3 MFC set to  0.000000
9/25/2011	4:58:52 PM	PHl3 MFC set to  0.000000
9/25/2011	4:58:52 PM	SiCl4 MFC set to  0.000000
9/25/2011	4:58:52 PM	Bypass solenoid MFC set to  0.000000
9/25/2011	4:58:53 PM	Tube furnace set to 0
9/25/2011	4:58:54 PM	Helium valve closed
9/25/2011	4:58:54 PM	BCl3 valve closed
9/25/2011	4:58:54 PM	PH3 valve closed
9/25/2011	4:58:54 PM	SiCl4 pre valve closed
9/25/2011	4:58:54 PM	SiCl4 post valve closed
9/25/2011	4:58:54 PM	Main Vac valve closed
9/25/2011	4:58:54 PM	Bypass valve closed
9/25/2011	4:58:54 PM	H2 valve opened
9/25/2011	4:58:54 PM	Bubbler valve opened
9/25/2011	4:58:54 PM	Helium MFC set to  0.000000
9/25/2011	4:58:54 PM	H2 MFC set to  500.000000
9/25/2011	4:58:54 PM	BCl3 MFC set to  0.000000
9/25/2011	4:58:54 PM	PHl3 MFC set to  0.000000
9/25/2011	4:58:54 PM	SiCl4 MFC set to  0.000000
9/25/2011	4:58:54 PM	Bypass solenoid MFC set to  0.000000
9/25/2011	4:58:54 PM	Tube furnace set to 1000
9/25/2011	5:18:54 PM	Helium valve closed
9/25/2011	5:18:54 PM	PH3 valve closed
9/25/2011	5:18:54 PM	SiCl4 post valve closed
9/25/2011	5:18:54 PM	Main Vac valve closed
9/25/2011	5:18:54 PM	Bypass valve closed
9/25/2011	5:18:54 PM	H2 valve opened
9/25/2011	5:18:54 PM	BCl3 valve opened
9/25/2011	5:18:54 PM	SiCl4 pre valve opened
9/25/2011	5:18:54 PM	Bubbler valve opened
9/25/2011	5:18:54 PM	Helium MFC set to  0.000000
9/25/2011	5:18:54 PM	H2 MFC set to  500.000000
9/25/2011	5:18:54 PM	BCl3 MFC set to  2.000000
9/25/2011	5:18:54 PM	PHl3 MFC set to  0.000000
9/25/2011	5:18:54 PM	SiCl4 MFC set to  50.000000
9/25/2011	5:18:54 PM	Bypass solenoid MFC set to  0.000000
9/25/2011	5:18:54 PM	Tube furnace set to 1000
9/25/2011	5:18:56 PM	Helium valve closed
9/25/2011	5:18:56 PM	PH3 valve closed
9/25/2011	5:18:56 PM	Main Vac valve closed
9/25/2011	5:18:56 PM	Bypass valve closed
9/25/2011	5:18:56 PM	H2 valve opened
9/25/2011	5:18:56 PM	BCl3 valve opened
9/25/2011	5:18:56 PM	SiCl4 pre valve opened
9/25/2011	5:18:56 PM	SiCl4 post valve opened
9/25/2011	5:18:56 PM	Bubbler valve opened
9/25/2011	5:18:56 PM	Helium MFC set to  0.000000
9/25/2011	5:18:56 PM	H2 MFC set to  500.000000
9/25/2011	5:18:56 PM	BCl3 MFC set to  2.000000
9/25/2011	5:18:56 PM	PHl3 MFC set to  0.000000
9/25/2011	5:18:56 PM	SiCl4 MFC set to  50.000000
9/25/2011	5:18:56 PM	Bypass solenoid MFC set to  0.000000
9/25/2011	5:18:56 PM	Tube furnace set to 1000
9/25/2011	5:33:56 PM	Helium valve closed
9/25/2011	5:33:56 PM	BCl3 valve closed
9/25/2011	5:33:56 PM	PH3 valve closed
9/25/2011	5:33:56 PM	SiCl4 pre valve closed
9/25/2011	5:33:56 PM	SiCl4 post valve closed
9/25/2011	5:33:56 PM	Main Vac valve closed
9/25/2011	5:33:56 PM	Bypass valve closed
9/25/2011	5:33:56 PM	H2 valve opened
9/25/2011	5:33:56 PM	Bubbler valve opened
9/25/2011	5:33:56 PM	Helium MFC set to  0.000000
9/25/2011	5:33:56 PM	H2 MFC set to  500.000000
9/25/2011	5:33:56 PM	BCl3 MFC set to  0.000000
9/25/2011	5:33:56 PM	PHl3 MFC set to  0.000000
9/25/2011	5:33:56 PM	SiCl4 MFC set to  0.000000
9/25/2011	5:33:56 PM	Bypass solenoid MFC set to  0.000000
9/25/2011	5:33:56 PM	Tube furnace set to 950
9/25/2011	5:38:56 PM	Helium valve closed
9/25/2011	5:38:56 PM	BCl3 valve closed
9/25/2011	5:38:56 PM	PH3 valve closed
9/25/2011	5:38:56 PM	SiCl4 pre valve closed
9/25/2011	5:38:56 PM	SiCl4 post valve closed
9/25/2011	5:38:56 PM	Main Vac valve closed
9/25/2011	5:38:56 PM	Bypass valve closed
9/25/2011	5:38:56 PM	H2 valve opened
9/25/2011	5:38:56 PM	Bubbler valve opened
9/25/2011	5:38:56 PM	Helium MFC set to  0.000000
9/25/2011	5:38:56 PM	H2 MFC set to  500.000000
9/25/2011	5:38:56 PM	BCl3 MFC set to  0.000000
9/25/2011	5:38:56 PM	PHl3 MFC set to  0.000000
9/25/2011	5:38:56 PM	SiCl4 MFC set to  0.000000
9/25/2011	5:38:56 PM	Bypass solenoid MFC set to  0.000000
9/25/2011	5:38:57 PM	Tube furnace set to 850
9/25/2011	5:43:57 PM	H2 valve closed
9/25/2011	5:43:57 PM	BCl3 valve closed
9/25/2011	5:43:57 PM	PH3 valve closed
9/25/2011	5:43:57 PM	SiCl4 pre valve closed
9/25/2011	5:43:57 PM	SiCl4 post valve closed
9/25/2011	5:43:57 PM	Main Vac valve closed
9/25/2011	5:43:57 PM	Bypass valve closed
9/25/2011	5:43:57 PM	Helium valve opened
9/25/2011	5:43:57 PM	Bubbler valve opened
9/25/2011	5:43:57 PM	Helium MFC set to  500.000000
9/25/2011	5:43:57 PM	H2 MFC set to  0.000000
9/25/2011	5:43:57 PM	BCl3 MFC set to  0.000000
9/25/2011	5:43:57 PM	PHl3 MFC set to  0.000000
9/25/2011	5:43:57 PM	SiCl4 MFC set to  0.000000
9/25/2011	5:43:57 PM	Bypass solenoid MFC set to  0.000000
9/25/2011	5:43:57 PM	Tube furnace set to 0
9/25/2011	5:56:21 PM	Helium valve closed
9/25/2011	5:56:21 PM	H2 valve closed
9/25/2011	5:56:21 PM	BCl3 valve closed
9/25/2011	5:56:21 PM	PH3 valve closed
9/25/2011	5:56:21 PM	SiCl4 pre valve closed
9/25/2011	5:56:21 PM	SiCl4 post valve closed
9/25/2011	5:56:21 PM	Main Vac valve closed
9/25/2011	5:56:21 PM	Bypass valve closed
9/25/2011	5:56:21 PM	Bubbler valve closed
9/25/2011	5:56:21 PM	Helium MFC set to  0.000000
9/25/2011	5:56:21 PM	H2 MFC set to  0.000000
9/25/2011	5:56:21 PM	BCl3 MFC set to  0.000000
9/25/2011	5:56:21 PM	PHl3 MFC set to  0.000000
9/25/2011	5:56:21 PM	SiCl4 MFC set to  0.000000
9/25/2011	5:56:21 PM	Bypass solenoid MFC set to  0.000000
9/25/2011	5:56:21 PM	Tube furnace set to 0
9/25/2011	5:56:22 PM	Run finished at 5:56 PM
9/25/2011	6:03:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/25/2011	6:03:38 PM	Recipe started at 6:03 PM
9/25/2011	6:03:38 PM	Helium valve closed
9/25/2011	6:03:38 PM	H2 valve closed
9/25/2011	6:03:38 PM	BCl3 valve closed
9/25/2011	6:03:38 PM	PH3 valve closed
9/25/2011	6:03:38 PM	SiCl4 pre valve closed
9/25/2011	6:03:38 PM	SiCl4 post valve closed
9/25/2011	6:03:38 PM	Main Vac valve closed
9/25/2011	6:03:38 PM	Bubbler valve closed
9/25/2011	6:03:38 PM	Bypass valve opened
9/25/2011	6:03:38 PM	Helium MFC set to  0.000000
9/25/2011	6:03:38 PM	H2 MFC set to  0.000000
9/25/2011	6:03:38 PM	BCl3 MFC set to  0.000000
9/25/2011	6:03:38 PM	PHl3 MFC set to  0.000000
9/25/2011	6:03:38 PM	SiCl4 MFC set to  0.000000
9/25/2011	6:03:38 PM	Bypass solenoid MFC set to  0.000000
9/25/2011	6:03:38 PM	Tube furnace set to 0
9/25/2011	6:04:46 PM	Helium valve closed
9/25/2011	6:04:46 PM	H2 valve closed
9/25/2011	6:04:46 PM	BCl3 valve closed
9/25/2011	6:04:46 PM	PH3 valve closed
9/25/2011	6:04:46 PM	SiCl4 pre valve closed
9/25/2011	6:04:46 PM	SiCl4 post valve closed
9/25/2011	6:04:46 PM	Main Vac valve closed
9/25/2011	6:04:46 PM	Bubbler valve closed
9/25/2011	6:04:46 PM	Bypass valve opened
9/25/2011	6:04:46 PM	Helium MFC set to  0.000000
9/25/2011	6:04:46 PM	H2 MFC set to  0.000000
9/25/2011	6:04:46 PM	BCl3 MFC set to  0.000000
9/25/2011	6:04:46 PM	PHl3 MFC set to  0.000000
9/25/2011	6:04:46 PM	SiCl4 MFC set to  0.000000
9/25/2011	6:04:46 PM	Bypass solenoid MFC set to  0.000000
9/25/2011	6:04:46 PM	Tube furnace set to 0
9/25/2011	6:05:46 PM	Helium valve closed
9/25/2011	6:05:46 PM	H2 valve closed
9/25/2011	6:05:46 PM	BCl3 valve closed
9/25/2011	6:05:46 PM	PH3 valve closed
9/25/2011	6:05:46 PM	SiCl4 pre valve closed
9/25/2011	6:05:46 PM	SiCl4 post valve closed
9/25/2011	6:05:46 PM	Bypass valve closed
9/25/2011	6:05:46 PM	Bubbler valve closed
9/25/2011	6:05:46 PM	Main Vac valve opened
9/25/2011	6:05:46 PM	Helium MFC set to  0.000000
9/25/2011	6:05:46 PM	H2 MFC set to  0.000000
9/25/2011	6:05:46 PM	BCl3 MFC set to  0.000000
9/25/2011	6:05:46 PM	PHl3 MFC set to  0.000000
9/25/2011	6:05:46 PM	SiCl4 MFC set to  0.000000
9/25/2011	6:05:46 PM	Bypass solenoid MFC set to  0.000000
9/25/2011	6:05:46 PM	Tube furnace set to 0
9/25/2011	6:05:47 PM	Run finished at 6:05 PM
9/25/2011	6:05:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
